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APPLIED PRECISION WAFERWORX 300 Products
Wafer Size:
Probe card analyzer, 12" | 2006 vintage.
Wafer Testing And M...
Wafer Size:
Wafer inspection station, 8"
Part #: 51-.
Probe card analyzer | 1998 vintage.
Wafer Testing And M...
Wafer Size:
Probe analysis microscope station, 8".
Wafer Testing And M...
Spare Parts
Lot of spare parts:
Quantity Part Number Description
2 21- BOARD,PRECISION,MEASURING
1 53- KIT,SPARES
1 805004 PCB,PRECISION,MEASURING.
Spare Parts
PCB, precision, measuring.
Wafer Size:
High current implanter, 8".
Etchers / Ashers
Etcher, | 2004 vintage.
Spare Parts
SYNERGY V452.
Spare Parts
Tungsten | (2) VHP robots.
Spare Parts
Wafer Size:
CVD chamber, 12"
Remote plasma source: MKS Astex Astron 2L
Main Dep. Manifold:
N2 - Pump Purge
N2 - 20.0 SLM
H2 - 10.0 SLM
1% PH3 in 99%
H2 - 100 sccm
SIH4 - 500 sccm
Clean Manifold:
NF3 - 1.0 SLM
AR - 6 SLM
N2 - Pump Purge
Bottom Purge Manifold:
N2 - 20 SLM
N2 - Heater Purge.
Mask & Wafer Inspec...
Wafer Size:
Patterned wafer inspection system, 8", 2000 vintage.
Mask & Wafer Inspec...
Wafer Size:
Automated defect review metrology system, 8"-12" | Wafer shape: Notch
Electron optical system:
| Acceleration voltage: 150V - 15000V | Probe current: 10pA - 1.2nA | SEM Resolution: 4nm @1KV | Magnification: X200 - X200000 | Maximum pixel: 1440 | Multi perspective SEM imaging (MPSI): Yes | VC Model (voltage contrast): Yes
Optical microscope system: | Bright light microscope: Yes | Dark field microscope: Yes | Objectives: 5X, 20X and 100X
SECS/GEM Communication interface: | Defect file format: Functionality confirmed to KLARF | Output file format: Same as input format | Host communication (SECS II / GEM /HSMS): Yes
Wafer stage: | Stage accuracy: ±1.5um | Unique die-to-die: Yes | Single image Automatic defect review (ADR): Yes | Automatic defect classification (ADC): Yes | Un-pattern review: Yes | Automatic process inspection (API): Yes | E-Chuck stage: No (Pins stage) | Anti charge-3 (E-SEM): Yes
Peripherals : | Port 1 type: OCLP
| Port 2 type: OCLP
| EDX: Yes | Tilt and rotation: Yes | Remote work station: Yes | Resolution target: Regular | Signal tower: Standard | EPDU: Yes | FIB: No.
Lab Equipment And A...
Centrifuge.
Mask & Wafer Inspec...
Inspection system, 8", 2006 vintage.
Spare Parts
Lot of Applied Materials 8” parts: | Qty
Description
P/N | (2) Assembly HTF/RTP bezel
ASSY outsource pin lift bellows 200mm sa
| (3) Assembly, std exhaust duct tpcc/rtp
| (11) Heater lift
ASSY (producer)
| (1) Heater
ASSY, mc tp sr w/aln insl, producer 200mm
ASSY, air flow pressure switch, RTP
ASSY reference hieght tool RTP
ASSY,teos lower 200mm ch,a/b/c,producer
| (10) Rear left hand door centura
| (12) Mod purch part, front center rail, lcf cardcage
| (2) Producer ch shipping clamp
| (18) Ring,rtnr,si insert RTP
| (3) Bracket, ivl, 3way divert valve, producer
| (1) Bracket,cable carrier,lft stdf,200mm smif-producer
| (10) Plate, mtg motion control box, producer s
| (10) Bracket, motion control box, producer s
| (5) Guide nut, lid interlock, 300mm producer
| (1) Gasket teflon reflector plate 200 mm xe RTP
| (8) Window, shipping, lamp housing, atm chamber
| (1) Bracket, lockout valve, gp 300mm producer
| (6) Alum wfr precision otf calibr 200mm, RTP
| (1) Bracket,robot support,left,200mm smif-producer
| (2) Connector, bottom, heater 200mm producer
| (1) Bracket,cable carrier,lft stdf,200mm smif-producer
| (30) Pin lift handle ball removal tool RTP
| (10) Cover mixing insert lid producer 200mm
| (20) Plate, manifold, lid, chamber producer 200mm sacvd
| (1) Plate, blower mounting, 200mm smif biocon,producer
| (2) Bar, side pallet mtg spcr, gas panel, prod s, spli
| (1) Blankoff,exhaust duct,bottom,prodroducer split frame
| (105) BRKT. 1/2 & 1/4 gas line 300 mm producer
| (7) Cover, viewport, transfer chamber lid, producer se
| (1) Bracket w/out vlv sld enc short producer split
| (2) Spacer chamber rack producer s
| (3) Insulator, sleeve, RF feedthrough, producer 200mm
| (2) Bracket, sw, smif fend, 200mm producer
| (2) Producer pilot guide right
| (4) Shelf, indexer, smif front end, producer
| (2) Clamp, foreline, bottom, non-dpa,200mm producer
| (15) Base ring display cover
| (1) Box, biocon connection, 200mm smif, producer
| (3) Top panel, rear, ugp
| (2) Enclosure, chamber rack, producer s
| (1) Pallet, side, prod s, split frame
| (9) Base, ac distribution box, producer s
| (6) Manifold, water, sae 9/16-18 producer 20
| (4) RF cover, right, producer 200mm
| (1) Bracket, smart-comm, 200mm smif-producer
| (1) Panel, dress loadlock, 200mm producer
| (10) Panel, side, ac dist. box, producer-s
Etchers / Ashers
Wafer Size:
CVD system, 6"
(3) chambers
Software: Classic
Wafer type: Flat-zone
Vacuum processing type
Chamber D:
Gas #1: WF6 30 sccm
Gas #2: N2 300 sccm
Gas #3: N2 2 slm
Gas #4: SIH4 30 sccm
Gas #5: H2 2 slm
Gas #6: N2 300 sccm
Chamber A:
Gas #7: WF6 30 sccm
Gas #8: N2 300 sccm
Gas #9: N2 2 slm
Gas #10: SIH4 30 sccm
Gas #11: H2 2 slm
Gas #12: N2 300 sccm
Chamber B:
Gas #13: WF6 30 sccm
Gas #14: N2 300 sccm
Gas #15: N2 2 slm
Gas #16: SIH4 30 sccm
Gas #17: H2 2 slm
Gas #18: N2 300 sccm
BWCVD Applied Materials lamp module
(2) MKS Baratron gauges
ENI RF Gen A OEM-6AM-1B-21251
ENI RF Gen B OEM-6AM-1B-21252
ENI RF Gen D OEM-6AM-1B-21252
Applied RF Match A
Applied RF Match B
Applied RF Match D DR
(4) Ebara exhaust pump RS00414
(4) Daitron UPS
Control box
Gas cabinet
(2) Power source box
Heat exchanger
Work stand
Carton case
Hard drive disket
Stored in cleanroom
1994 vintage.
Spare Parts
Lot of Spare Parts:
Quantity Item description OEM part number
10cx, 10a parts
1 assy, mca+, ac box 2
1 signal distribution 300mm, gas panel
1 signal distribution 300mm, gas panel
1 wassy, pcb,i/o expansion with dual serip w
1 pcb assembly, signal conditioning produc
1 kit, pvd htesc hi-volt pwr supply chassi
1 assy tc amp low temp besc
1 card piii 400mhz 128mb ram vme bus singl
5 cover ring, 8 adv 101-cust prvd flm spr
1 assy, universal lift plate, 150/200 mm d
2 assy, universal lift plate, 150/200 mm d
1 assy, universal lift plate, 150/200 mm d
1 faceplate, water cooled, 200mm sacvd pro
1 pcb assy, contactor interlock, producer
1 pcb assembly tc amp/interlock
1 chamber liner, qtz, lower rp
2 chamber liner, qtz, lower rp
1 pwrsp, 1.5kv dc, htesc
1 dome, upper, rp
1 dome, upper, rp
1 dome, upper, rp
1 wvalve, injection 208v teb 120c stec w
1 chamber liner, qtz upper rp epi
3 chamber liner, qtz upper rp epi
1 chamber liner, qtz upper rp epi
1 carrier,lower wxz
1 ado controller boards
1 assy, htesc motorized lift
1 kit, mca+ integration
3 epi lower liner - -001
1 vga video controller assy - radisys amat 486
4 slit valve assembly (,, , smc cyclinder)
3 slit valve assembly (,, , smc cyclinder)
1 epi wafer lift shaft
1 pcb assembly, tpu edwards burnbox intfc
1 xmp motion controller, 3u, firmware b5
1 chamber liner,qtz upper
2 chamber liner,qtz upper
1 assy 101 wafer lift
1 seriplex mux i/o pcb(2), (048-079h)
1 seriplex mux i/o pcb(2), (048-079h)
1 receiver
1 pcb assembly, manometer select board
1 kit, ws, ch electricals, 3 & c, mca+
1 kit, dep ring restraint pin, mca e-chuck
1 kit, 75' umbilicals, htesc
1 "cover, screw, quartz cathode liner, 300m
(susceptor, pre heat ring, lift pin, quarts liner)
1 multiplexed i/o control board, ch b
1 wchamber driver,pvd dual zone,htesc, w
1 pcb assy, analog input/output
4 pcb assy, analog input/output
1 pcb assy, analog input/output
1 pcb,apc ch c
1 pcb,seriplex chamber b
1 shaft, wafer lift, r3 rotation, epi 200m
1 bulletin
human interface module - epi
2 "rev c r edge, focus, 8""
coorstek: ck020956"
1 multiplexed i/o control bd, aux 3
1 epi 8" 5200 temp prof
1 plate, pumping 6" dcsxz
1 plate, pumping 6" dcsxz
1 pcb assy, centerfinder control
1 harness assy, interconnect, pvd imp ch,
1 "kit, 50 sccm stec mfc w/hrdwr unitbody
(, , ,, , ,,,)"
1 epi - ethenet board
1 mca+ esc wafer detect assy
5 pedestal, 8a101(flat)-cust prvd flm spr
1 kit, mfc 780c 20sccm ar 1/4vcr
1 mfcsccm n2 1/4vcr mtl nc 9p-d 15
2 qterm-j10
-applied precision model j244 52-
1 epi - deltron md: fm12c6-08 output 600 w max 2.4v fm12c6-08
1 amat dnp cpci 1
1 assembly pcb bst level sensor
2 pcb assy, serial isolator
1 card cpci 32/16 analog 32/16 i/o
3 e-chuck ce 1.5kv inverter pcb 2303117-a
1 assy,hd dr,ide w/contrlr pcb 853-
1 insulator ar, mixed
2 list 8" shield
1 susceptor, r3 rotation, no center, epi 2
1 dual hv-smps controller interface board fusion 386642
4 assy, left hand, pivot and bearing hp+/v
1 mfc 1660 2slm h2 1/4vcr mtl nc hov 9d
1 valve press cntrl 1-3/8idxkf40 w/viton o
1 vme stepper controller i
1 valve, block, nupro, 10 ra max
shaft, mag rotation, long type
1 bellows,lower dcxz
1 pcba,tc amp/interlock
1 insulator, quartz, 300mm, simple cathode
1 auto mirror system - epi
2 epi - 300mm susceptor
2 epi - filter
1 pcb assy, centura chamber a/c interconne
1 pedestal, pcii 8 jmf @ c&d
1 0100pcb assy,remote wiring distribution
1 0100pcb assy,remote wiring distribution
1 digital i/o pwb assy
2 pcb chbr tray intc b & d centura mcvd
1 card interface dnet rs232 8bi-dir di/o
1 lid lift fixture 300mm dps2
shaft, mag rotation, long type
1 ring preheat, profiling
3 ring, dep, 8 jmr, alum, htesc, wb chm
1 ring, dep, 8 jmr, alum, htesc, wb chm
1 ring, dep, 8 jmr, alum, htesc, wb chm
1 ring, dep, 8 jmr, alum, htesc, wb chm
2 ring, dep, 8 jmr, alum, htesc, wb chm
1 assy, pwb, liquid source heater c
5 obs digital input output pcb
2 obs digital input output pcb
1 pcb assy, tc gauge
1 pcb assembly, seriplex i/o distribution,
1 blade 8" 101 shutter
1 controller, temp, heated exhaust
1 pcb assy n2 dry vac distribution
1 assy pcb analog i/o aio bd
1 pcb assy expanded seriplex interconnnect
1 faceplate, giga-fill sacvd, bpsg cent 23
1 pcb assembly tc amp interlock 300xz.
1 controller, pou reactor, ch ac 200mm &
2 controller, pou reactor, ch ac 200mm &
2 flow point valve 53-
2 flow point valve 53-
1 epi door opener process board 77-
2 holder, wiper indexer
1 obs assy, pcb, tc amp interlock
1 t/c, degas unified wire harness
2 valve air-act 2/2wy sst nc 1-1/4orfcx 1-
1 plate perf 6 inch ec wxz 119423
4 kit h20 ftgs sst, pvd source
2 hoop, 8" hthu heater
3 shfpcb assy, isolation amplifier
1 kit heat shield wtr cool chmbr w/ 8" zx
1 end effector, 200mm manual
1 pcb, assy rtp chamber interface
1 plate,blocker 6 ec wxz
7 esc anti-lift bracket
2 epi bracket
1 gas lines
1 panel assy, mfc access, (ch d,4,3)
1 tc amp intlk
1 pcb assy ccd
1 pcb assy ccd
1 weldmnt, inlet w/o diverter, wxz
1 pcb assy,chmbr interface
2 pcb assy,chmbr interface
4 pcb assy,chmbr interface
1 card devicenet analog i/o controller 3u -cdn496
2 lamp interface ctrl board delta ( axcelis tech) 60551
1 5 phase driver
3 insulator source 13"
1 pcb assy, 5-phase stepper driver interfa
1 card vme intfc seriplex ntwk 10-192khz
1 xdcr 0-10 torr cap mano 1/2 vcr d-conn
1 56n 3n345a toray engineering l75cn-b
1 card, digital dnet dio 391-4
2 pwb assy lamp control pwn board (axcelis) 58478
4 pcb assembly chopper drive i
1 pcb assy chamber interconnect bd
1 pcb assembly, centura apc matrix bid
1 pcb assembly, centura apc matrix bid
4 digital input output pcb
3 digital input output pcb
1 digital input output pcb
1 probe t/c moly sheath 1/8" dx9" l type
1 bellows assy kit nw-100 766-
endpt det - dual 853-
1 kit, per mfc/byp, mixed, doubl pneu, ver
1 assy, poly dps-a3, chamber interface
2 epi quart wafer lift shaft
1 insulator ceramic durasource ttn
2 pcb assembly relay control board
1 ring, edge protector, upper & lower dome
1 ring, edge protector, upper & lower dome
2 pedestal, 150mm, al, flat, finger
4 line, 1/4 mnfld p/p downstream, epi
2 ball screw assy,wxz
1 amat pent p133 board
1 vlv, lpv, kf40, ang, hot
1 8"hoop with tc
1 blocker plate, n2, giga-fill sacvd
1 blocker plate, n2, giga-fill sacvd
1 levelite universal controller 10251nio
2 ssr 70s-03-b-25-s
1 5 phase driver
1 assy bellows upper mag coupled rotation
1 power supply, local, radiance maglev
1 assy, pvd slit valve door & mount
1 faceplate, giga-fill sacvd, usg no cent
2 bellows, gasline, w/flat
1 pcb assy,tc amp & interlock bd,dxz
1 cable assy heater ch. c/d
2 welded metal bellows mlakkx0191-01
6 pin, wafer lift, 200mm, thin wall silico
2 pin, wafer lift, 200mm, thin wall silico
1 assembly, pcb, chamber lift rf filter
2 assy wf6 inlet w/o diverter wxz
1 thermocouple, slo coated, asp/prsp baske
2 short feed, lamp
1 pwb assy 8086 cpu card - fusion systems 248411
2 socket, ball joint, chamber vacuum test
1 post, dc bias
1 kit, pall filters-proc/htr lines
1 kit, pall filters-proc/htr lines
1 blade 8 transfer frog leg
1 blade 8 transfer frog leg
1 cover ring sst 8 101
4 cover ring sst 8 101
3 cover ring sst 8" 101
1 hoop, 6" hthu heater
1 plate, blocker 200mm non r-f
1 pcb assy, interlock select
1 ufc-8561c -h2 -500 sccm
1 schoroff - extension board 021-653
1 sec-4400m - n2 - 20 sccm sec-4400m
1 sec-z512mg - n2 - 100 sccm sec-z512mg
1 ufc-1685 -10 slm - o2 - ufc-1685
1 guide shaft wafer orienter
1 sw,vacuum,75 torr,vcr-4,close decreasing
1 slit valve door, centura pdd e38 bonded
press abs 500torr 0.1-1@12vdc 50deg
1 blade, 8 transfer, hp+ deep pocket
1 blade, 8 transfer, hp+ deep pocket
1 kit, elec, htesc pve chamber, endura
2 pedestal thick 150mm graphite/quartz
2 clamp, shield 8 wafer
1 clamp, shield 8 wafer
1 lift hoop,8"wide body,101% coverage
1 cassette stage
1 gas line no.3 preclean chamber (reactive preclean)
2 motor assy indexer
1 pcb, thermocouple gauge
1 pcb tc gauge w
1 wpwb assy detect ii ease/non-ease
1 wpcb assy n2-dryvac dist
4 brg,4pt cont,8.625od x 8id x .3125w w/ca
3 screw alum. btn hd
4 cmptr drive floppy 3.5" external lpt2
2 sw press .156"dia smooth ctr port 0.5 to
1 mks baratron capacitance manometer, range 1 torr 127a-13608
4 millipore wafergard iii nf-30 3.31" 1/4" vcr wg3ns6rr2
1 millipore wafergard iii nf-30 3.31" 1/4" vcr wg3ns6rr2
3 dps wafer lift pin assy
1 blade, 8 buffer hp+, hthu, rcf compatib
1 pcb assy stec mfc adaptor metch mxp
1 hoop, lift, open, 8" mca e-chuck
1 holder, seal indexer revised
1 holder, seal indexer revised
1 manifold, output, dxz
1 assy pcb, loadlock interlocks
1 linear slide, lubricated
4 kit, blankoff htesc pwr supply chassis
3 kit, blankoff htesc pwr supply chassis
2 thermo couple "k" type
1 pumpsplitter power/signal 3way
1 valve mnl diaph 145psi 1/4vcr-f/f swvltg
1 blade, 8 buffer hp+, hthu, rcf compatib
1 blade, 8 buffer hp+, hthu, rcf compatib
2 sapphire pin, heater lift, dcsxz
2 short feed, lamp
1 speed control board - brushless motor driver 810-17041
1 gas distr. plate sputter
1 cam, right outboard
1 cam, right inboard
1 collar al 200mm ceramic
1 cover,clamping ring,al,200mm, ceramic
2 smc pneumatic block ex106-sdn1
2 manifold, teflon feed thru, lid, ch prdc
1 smif asyst wide body w/flashing status tower assy
1 kit, vlv pneu n/o veriflow 10ra
1 kit, vlv pneu n/o veriflow 10ra
1 mkd baratron presure tranduser range 20 torr 626a21tbe
1 mkd baratron presure tranduser range 1 torr 627a1tbd
4 gas distr. plate sputter
1 pcb assy, operator control panel with in
1 cam left inboard
1 lift hoop 6" 101% w/b ch
1 assy. transfer chamber, wafer detect sen
1 cable assy, mfc adapter, with emi filter
1 cam,left outboard
1 assy,fan rot intrlk
1 fan rot interlock
1 block, fixture, gas spring 13"
1 connector for systems controller process pump -3p-4w-250v-30 cs-8365c
2 shaft wing, frog leg
1 harness assy, adaptor throttle valve, 30
6 line,1/4 source,xdcr/rgltr with pump/pu
1 baffle, qtz inject
1 kit, htesc chamber integration
1 harn assy,intlk,wxz ch.
1 card cage enclosure
1 pcb flatfinder motor driver assy
2 harness assy, powerware maglev lps exten
2 mixer gas box lid bwcvd
1 conn adptr ps/2-to-serial
3 assembly, dc bias
1 bracket, lower coil
2 feedthru lamp
1 bracket vcr cross
1 pcb assy operator control panel
3 sw, 75 torr, vcr-4, close decreasing tor
7 tip,susceptor shaft,outside
1 tip,susceptor shaft,outside
1 mkd baratron presure tranduser range 10 torr 626a11tbe
1 seal bonded slit valve, viton, endura.
6 seal bonded slit valve, viton, endura.
1 housing, quartz tube sacvd
1 motor driver interface pcb cable assy
in-ln gas 3000psig 9/19-mfc m-vcr
1 pcb assy, remote supply distribution
3 pcb assy, remote supply distribution
1 brg linear ball 875 od 5" bore .046
8 spacer,bearing,throttle valve,teos
1 filter, 670nm, 1.2dia., .1thick
1 valve fine mtr 1/4 vcr vernier hdl
5 d.i.sensor assy
1 hub dc bias modified shutter compatible
1 cable, adapter, unit 8161 mfc
1 window slit cvd chamber
3 window slit,al203
1 window slit,al203 .
Spare Parts
Lot of Spare Parts:
QTY TOOL TYPE P/N PART NAME
ADVANCED DELIVERY AND CHEMICAL SYSTEM INC GAS CABINET
ADVANCED DELIVERY AND CHEMICAL SYSTEM INC GAS CABINET
ADVANCED DELIVERY AND CHEMICAL SYSTEM INC GAS CABINET
MDX-20K Master Delta DC Power Supply
MDX Delta Power Supply
C PMH 13/3000
AM90LY4 MOTOR
AKH262 ATOMIC FORCE MICROSCOPE
990104 THERMOVISION 550
AT-1 AIRFLOW THERMOMETER
ATP80 VACUUM PUMP
22426T RTD CALIBRATOR
13 P258 GAS PANEL BOARD
6 P257 BAY A-188-4 PNEUMATIC SOLENOID PANEL
6 P175 REV.C TEOS INTERLOCK BOARD
6 P174 TEOS INTERFACE BOARD
5 P180 LIQUID SOURCE HEATER CONTROL BOARD
LEVELITE UNIVERSAL CONTROLLER
MASS FLOW METER He
18 P131 FLUID OVERFILL BOARD
TURBOTRONIK NT340M/I
CONTROL ASSY
13 P123 WAFER SENSOR BOARD
10 P127 LOADER INTERCONNECT BOARD
14 P029 TURBO INTERCONNECT ASSY
13 P076 K1 ASSY
14 P5000 BES-530-8S-PCB STOP VALVE MANIFOLD AND PCB
4 P237 DUAL FREQ WIRING INTERCONNECT BOARD
TURBO PUMP TURBOVAC 340MC
2 P057 CYLINDER LIFT ASSY ETCH
TC CONTROL ASSY
5 P822 TOP LID
14 P181 5000 WIRING DISTRIBUTION BOARD
12 P535 ERGO PNEUMATIC BOX
15 P181 DC POWER SUPPLY
15 P008 PNUEMATIC CONTROL BOARD
14 P104 CONTACTOR INTERLOCK BOARD
4 P145 RS232 VIDEO INTERCONNECT BOARD
49 P5000 AMI # POWER DIST
6 P5000 AMI # PTC POWER DIST
5 P103 AC INTERCONNECT BOARD ASSY
53 P099 CHAMBER INTERCONNECT BOARD ASSY
11 P088 CENTRE FINDER SENSOR BOARD
18 P108 ASSY PCB
8 P106 EXPANDED GAS PANEL INTERFACE BOARD
9 P107 TEOS GAS INTERFACE BOARD
25 P341 WAFER LIFT PRECISION 5000
13 P033 WAFER LIFT CERAMIC HOOP
16 P029 P-CHUCK LIFT PRECISION 5000
26 P340 SUSCEPTOR LIFT ASSY
WATLOW 93 UNIT
6 P109 K TYPE PCB
1 P239 BOOMERANG BOX
51 P5000 AMS 69066 COMPUMOTOR AM5
PARKER CONTROLLER DIGIPLAN DIGITAL STEPPING MOTOR DRIVE
2 P011 APPLIED MATERILAS CHOPPER DRIVE EWV
7 P299 8115 CPU BOARD
1 P3A-01-40W POWERSPEC
1 P5000 HSU100-12 CARLTON BATES WBPS-15-7
22 P5000 LAMBDA LIS-71-15 LAMBDA LIS-71-15
7 P5000 LAMBDA LIS-31-12 LAMBDA LIS-31-12
28 P008 TC GUAGE PCB
28 P014 OPTO DETECT PCB
14 P009 BUFFER I0
3 P162 I/O DISTRIBUTION BOARD
1 P103 MONITOR BASE
1 P017 CHAMBER INTERCONNECT BOARD
1 P304 WIRING DISTRIBUTION BOARD
6 P5000 TURBOVAC 340MC LEYBOLD MAG400 MC
1 XR80 ITL CHASSIS ASSY
1 XR80 ITL CHASSIS ASSY
1 XR80 ITL CHASSIS ASSY
80Kv PRE ACCELERATION CONVERTER
HV POWER SUPPLY
1 XR80 481240 ESS POWER SUPPLY
DATA ACQUISITION INVERTER
TPDU MONITOR
CONTACTER DRIVE
24V 1A POWER SUPPLY
DAQ MK2 TYPE B
ARGON-OXYGEN BELLD AND CHARGE MONITOR
SPIN WINDOW
CHARGE VOLTAGE
PNEUMATIC CONTROL
SOL/FIL EXT INTERFACE
VACUUM CONTROL INTERLOCK
VACUUM CONTROL INTERLOCK
ROBOTIC INTERFACE
VACUUM CONTROL DRIVE
VACUUM CONTROL FEEDBACK
CRYO TEMPATURE MONITOR
SCAN CLOCK
4 PHASE STEPPER CONTROLLER
THERMISTOR GUAGE CONTROLLER
TILT ANGLE CONTROL
ION GUAGE CONTROLLER
WAFER LOADER CASSETTE INDEXER
BEAM PROFILER INTERFACE
ORIENTER INTERLOCK
WAFER LOADER INTERLOCK
TILT INTERLOCK
WHEEL CURRENT
SPIN SCAN RELAY
CONTACTER DRIVE
BEAM PROFILER MICRO CONTROLLER
2 XR80 W MOTOR DRIVE UNIT
VOLTAGE CLAMP UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT
CHASSIS UNIT MISSING FAN
CHASSIS UNIT
CHASSIS UNIT
300MM WAFER LOADER MOTOR ASSY
PNEUMATIC &
RELAY PANEL
58 P002 DIGITAL I/O CARD
3 P175 SUSCEPTOR ASSY
20 P054 ANALOG INPUT BOARD
21 P001 ANALOG OUTPUT BOARD
SYNERGY MICROSYSTEMS V4.8 CPU
11 P050 VGA VIDEO CONTROLLER
55 P003 STEPPER DRIVE ASSY
4 P023 MINI DI/DO BOARD
29 P022 MINI AI/AO BOARD
7 P933 HV MODULE ESC
2 P386 STAND ALONE MONITOR BASE
E CHUCK CONTROLLER
26 P136 MINI DI/DO SHORT CIRCUIT PROTECTED BOARD
INTELIGENT INTERFACE &BUS BUFFER
2 P149 HARNESS
2 P150 HARNESS
1 P144 CABLE
1104B SCANNING MONOCHROMATOR
1 P5000 AC11200-00LA WESTER DIGITAL CAVIAR 11200 MODEL AC11200-00LA
1 P172 EIGHT CHANNEL EMISSION/LASER ENDPOINT BOARD
FULL P5000 GAS PANEL
FULL P5000 GAS PANEL
THERMAL ELECTRIC DRIVER II
13 P-D PCB
13 P019 CONTROLLER DISTRIBUTION WPS BD
13 P137 ENCODER INTERFACE BD
13 P071 SBC 1/0 BREAKOUT BD
12 P056 INTELIGENT
3 P061 THERMAL ELECTRIC DRIVER
5 P117 DIO FUSE BD
58 P134 DIO
FUSE BOARD
7 P088 DRIVE
12 P011 A1 MUX/CURRENT SENSE
5 P003 DIGATAL 1/0 BOARD
7 P012 PCB POWER SUPPLY BACKPLANE
5 P254 POWERSUPPLY BACKPLANE
13 P085 STSTEM ELECTRONICS BACKPLANE
13 P LAMBDA SWITCHING POWER SUPPLY
3 P036 MINI CONTROLER
3 P181 COLLAR QUARTZ LOWERED CATHODE
4 P182 FOCUS RING LOWERED CATHODE
2 P416 COLLOR 200MM NOTH LOW PROFILE
3 P464 SUSCEPTOR ASSY
AMAT CVD MATCH
3000V, 13.56MHz W
AMAT ESC PSU
AMAT ETCH MATCH
3000V, 13.56MHz W
752 057 2050 AMAT LF5 GENERATOR 752 057 W, 50-460KHz
AMAT MATCH W
1 P5000 T2OPI- TUBE CONTROLLER CX 2000
22 P003 DIGITAL I/O BOARD
2 P003 STEPPER DRIVE
2 P379 LAMP TEST MOD 1 PAB
2 P088 HARD DRIVE
1 P1-004 MONOLITHIC STAGE BACKPLANE
1 P024 INTERFACE PROCESSER DIST
1 P067 MAINFRAME PNEUMATIC INTERCONNECT
1 P066 ANOLOG SYNC DETECT BD
1 P5000 T2DCI- HEATER TAPE UNIT
1 PKEE83486 NITRIDE HEATER BLANKET CONTROLLER
1 P5000 ? CONNECTOR BOARD
1 P289 CYLINDER
1 P090 MONITOR BASE
1 P173 POWER SUPPLY
1 P5000 ? WATER COOLER
4 P966 B CHAMBER
2 P116 INTERFACE CONNECTOR
2 P116 INTERFACE CONNECTOR
CHAMBER TRAYULTIMA
ASSY PNEUMATIC
ASSY RF MATCH BW ETCHBACK
EXU-246R3 SSD POWER SUPPLY
CHAMBER TOPS
ABX-X494 /
HV FILTER BOARD
STEPPER CONTROLLER BOARD
ASSY RF MATCH BW ETCHBACK
? TURBO PUMP TURBOVAC 340MC
LAMP MODULE ASSY PLATED 200MM
PTC POWER DIST
LIS-71-15 LAMBDA LIS-71-15
MONITOR STAND ALONE
REMOTE WIRING DISTRIBUTION BOARD
REMOTE SIGNAL CABLES
PTC POWER DIST
118-10-0030-0 MOTOR
KB5965V PC
AET16-4490C TURBO-MOLECULAR PUMP CONTROLLER
STEPPER CONTROLLER
ANOLOG I/O BOARD
LOADLOCK INTERLOCK
COMPONENT SIDE
CONNECTOR BOARD
MSX-X735 RF GENERATOR CONTROLLER
ARX-X252 RF OUTPUT
SYSTEM ELECTRONICS BACKPLANE
GAS PANEL BD
TURBO INTERCONNECT
OPTO DEFECT
WAFER SENSOR BOARD
TEOS STATUS BOARD
GAS PANEL BOARD
TEOS INTERLOCK BOARD
MODIFIED N-DRYVAC DISTRIBUTION BD
SSR AC CONTROL
TEOS GAS INTERLOCK BOARD
STEPPER MOTOR DRIVE
STEPPER DRIVE
SERIAL SIDEBOARD ASSY
CHAMBER INTERCONNECT
A1 MUX/CURRENT SENSE
DIGITAL I/O CARD
LIS 71-15 LAMBDA LIS 71-15
BUFFER I/O
MINI DI/DO SHORT CIRCUIT PROTECTED BOARD
FLUID OVERFILL BD
THERMAL ELECTRIC DRIVER
DIO FUSE BD
ANALOG OUTPUT BOARD
PCB ASSY TC INTERLOCK
LIQUID SOURSE HEATER CONTROL BD
INTELIGENT INTERFACE
077-592 ELECTRONICS BACKPLANE BD
REMOTE WIRING DISTRIBUTION BD
GAS PANEL BOARD
PCB VME SBC
TEOS TEMP CONTROL BOX
LEVELLITE UNIVERSAL CONTROLLER
CENTRE FINDER SBL ASSY
CENTRE FINDER SBL ASSY
DIO FUSE BD
PCB TC&INTERLOCK
VME TO DUAL FREQ WIRING INTERCONNE
ELECTRONICS BACKPLANE BD
PNEUMATIC SOLENOID PANEL
PLATE PEDESTAL
HDP COLLAR CLEAN
HARNESS ASSY
S100EDZ8FLC PC
SD5904C MONITOR
36-0080 TESTER INTERFACE
36-0201 H2 MAIN INTERFACE
RUBBER SILICONE HEAT CONDUCT
FIELD RETRO
SCREWLESS BB TEOS
DIRECTIONAL POWER SENSORS
RELAY THERMAL OVER LOAD
CB MAG THRM 3P 240VAC
O7N9212 HARD DRIVE
MONITOR BASE ASSY
HDP-CVD RPSC APPLICATOR
DC POWER SUPPLY
PA TUBE FOR TOP/SIDE DECK
SERIPLEX POWER DIST BD
SERIPLEX PCB
PWBA EXSTENDER
POWER SUPPLY
COVER ASSY LLC BOLT DOWN
FLTR LOW-PASS BOX
8 SLOT WAFER POSITION SENSOR
A 1850 DC POWER SUPPLY
ROBOT DRIVE
200MM STORAGE
15 SLOT STORAGE ELEVATOR
PUMP TURB FRKLN MTR
KIT LEYBOLD TURBO PUMP SEALS
MFA HEATSINK ADAPTER ASSY
ANALOG OUTPUT PCB
MODIFIED N2 DRYVAC PCB
CLEANED LID GAS BOX OXIDE
SHIELD 200MMGIANT GAP NITRIDE
CBTHERM MAG 3P 240VAC
VME HARD DISK DRIVE
VACUUM CONTROL INTERLOCK
MINI AI/AO BD
TEMPERATURE CONTROL SERVO
ORIENTOR INTERLOCK FLAT AND NOTCH
WAFER ARM INTERLOCK
CONTACTER DRIVE
ARM LOWER RIGHT ROBOT DRIVE
TURBOTRONIC NT 20
STORAGE ELEV WAFER CASSETTE HANDLER
MONITOR BASE ASSY
6 P194 SHIELD TAPERED 200MM
1 C/E/M 001-21999 3 laser robot char fixture assy & case
2 P080 Zero Position tool
2 CVD 010-38027 Throttle Valve, CVD, P5000
PCB ARC VOLTAGE BOARD
PCB SOL/FIL EXT INTERFACE BOARD
PCB SPIN WINDOW BRD
PCB E GUIDING TUBE BRD
BEAM STABILITY MONITOR
BEAM PROFILER I/V
IV CONVERTER WHEEL
VACUUM TARGET SYSTEM MIMIC PANEL
VACUUM WL MIMIC PANEL
WAFER ARM POSITION PCB
WAFER ARM INTERLOCK
WAFER ARM GRIPPER I/F
I/V CONVERTER WHEEL
LEYBOLD TURBO CONTROL NT20
PFS CHASSIS NO DAQS
EDWARDS ACTIVE GAUGE CONTROLLER
4 XR80 D ION GAUGE CONTROLLER AIG-E-B2E
RECIF BATCH ALIGNER WITH PSU
BLADE MOTOR ASSY
CASSETTE INDEX ASSY 200MM NO ORIENTOR
TARGET CHAMBER VACUUM CHASSIS (NO DAQS)
VENDOR I/F A MAG
VENDOR I/F PRE ACCEL
SOURCE MAGNET CONTROL
80 KV STACK ASSEMBLY
LINEAR TRANSDUCER AND CONTROL BOX
GND PDU CHASSIS (NO DAQS)
1 XR80 ITL WAFER LOADER CONTROLLER CHASSIS
2 XR80 ITL 5FA DIRECT DRIVE INTERFACE CHASSIS
BEAMLINE VACUUM CHASSIS NO DAQS
HITEK SERIES 1000, POWER SUPPLY
1 XR80 ITL TARGET SYSTEM ELECTRONICS CHASSIS
BEAMLINE FOCUS DECEL CHASSIS X30H
XR80 EXTRCTION ASSEMBLY
SCAN DRIVE MOTOR
DIRECT DRIVE MOTORS
200mm WHEEL ASSEMBLY
AMAT CMP Head 200mm
Retaining Ring Composite 8" Titan Head
extraction assembly canister
mrs assembly
sourse assembly
SUSCEPTOR LEVELING TOOL
4193A RF TUNING KIT
WIRING DISTRUBUTION BOARD
ESC TEST 300MM DUAL HE CVD
2 HDP 911-02712A DOME TOP FEED HDP CVD 300MM ULTIMA PLUS
PLATE VITON FACE SEAL
NSK CONTROLLER
API CONTROLS
3 HDP PX245-02AA VEXTA STEPPING MOTOR
65 HDP 852B12PCJ2GC BARATRON PRESSURE TRANSDUCER
11 HDP SS-43GVS4 VALVE
SERVICE TOOL ROBOT BLADE 300MM
GIMBAL ROD
LID ASSEMBLY
1 ENDURA 9400X-XA24-AEB1/0009 RECTANGULAR DOOR L-VAT
ENDURA DIMAX MOTOR
COMB PASSTHRU CASSETTE
POWER SUPPLY
300mm PVD SOURCE
E-CHUCK 300MM
HEATER PEDESTAL
HEATER PEDESTAL
LIFT HOOP ASSEMBLY
DISK SHUTTER SIP
ROBOT BLADE
RETAINING RING
MIDDLE CLAMP
CONTROL BOX
-004 BLOCK 300MM MAGNET HOLDER AND MAGNET
-004 BLOCK 300MM MAGNET HOLDER AND MAGNET
5TOT006374 PRESS TRANSDUCER
900-041-G3 FLANGE EXTENSION KIT
ROBOT CONTROLLER ELA-B014CFG-03
INR-498-012D-X007 SMC THERMO CHILLER
3 CHANNEL HEATER/SUSCEPTOR LEVELING SYSTEM
TEMPLATE DRILLING PANEL
RETAINING RING
FRONT COVER WET ROBOT
CARRIER 300MM
MEMBRANE SUPPORT FIXTURE 300MM TITAN HEAD
1 ENDURA 73-560-4094 POWER SUPPLY
TURBO AC POWER SUPPLY
3 ENDURA TSPTT100 TRANSPECTOR 2
OPERATOR CONTROL PANEL I/O BLOCK
1 ENDURA 9400X-XA24-AEB1/0012 RECTANGULAR DOOR L-VAT
MINIENVIRONMENT PRESSURE GAUGE
3 ENDURA 89013 MGE UPS SYSTEM
SCR POWER SUPPLY
LM GUIDE ACTUATOR
XP ROBOT CONTROLLER
1 HDP K60134 LAMBDA POWER SUPPLY
COLLAR 300MM
LAMP FLUORESCENT 17W
CATHODE STAND ULTIMA 300MM
1 HDP MQDB011AAD01 PANASONIC DRIVER
DEVICE NET I/O BLOCK
LIFT PLATE LIFT ASSY
ASSY SWLL BELLOWS
ULTIMA CATHODE
PADDLE DUAL BLADE ROBOT
1 HDP 263-14203 EXTENSION PANEL
GAS PANEL DIST BD
PANEL DISTRIBUTION BOARD
2 HDP 77- ROBOT AXIS MULTILINK
KENSINGTON LABS
CHAMBER DIST BD
89013 MGE UPS SYSTEM
POWER SUPPLY
PEABODY SCIENTIFIC CONTROLLER
PRECISION PARAMETER ANALYZER
CS SOURCE 110V POWER SUPPLY
KIT PM PC11 300MM
300mm PVD SOURCE
CONTROLLER BACK PLATE
WAFER SENSOR ASSY
CHC I/O LIFT ASSY
DEGAS LIFT HOOP
CHAMBER I/O BOARD
CONTROLLER DISTRIBUTION BOARD
CHC I/O LIFT ASSY
HEATER LIFT ASSY
SPOOL SEPERATOR
CH PNEUMATIC MANIFOLD
2 ENDURA 8511 INDUSTRIAL COMPLIANCE METER
FLUX SHAPING MAGNETS
CH3 WAFER LIFT ASSY
DEGAS WAFER LIFT
16- CHUCK,PEM,SABRE
ASYST NRI 1150R SMIF INDEXER
DT12N/DT12P/DT512N/DT512P DIGITAL GAUGE
MDX PINNACLE
11764 TURBOVAC 1000C
CHAMBER POLISHER
BN SIEMENS PUMP
TARGET LOCKING DEVICE RETROFIT KIT
TARGET GRAVITY SAFE LOCK LEFT ASSY
TARGET GRAVITY SAFE LOCK RIGHT ASSY
LEGACY PMR TARGET LOCKING DEVICE RETROFIT KIT
RETROFIT FLEXLINE HTR PURGE
BRACKET CPCI INBOARD SECURING
4 ENDURA -004 BLOCK 300MM MAGNET HOLDER AND MAGNET
PEDESTAL LG OG PRECLEAN
1 ENDURA PT- PEDESTAL SHIELD LOWER LARGE OD
RING EDGE ALUMINUM
SUPPORT LG OG PRECLEAN
VME CONTROLLER RACK
PLATE TOP BLANK OFF BASE RING
FI CONTROLLER
KIT VME CONTROLLER SHORT DRAWER
ROTOR MAGLEV
CENTURA CONTROLLER
COVER ROTATION
DATUM GAUGE
3 CENTURA SUA1000J UPS SMART-UPS
2 CENTURA Y UPSTATION GXT
3 CENTURA HA03- HOT PLATE
MINIENVIRONMENT PRESSURE GAUGE
1 CENTURA 25- SERVO POSITIONING CONTROLLER
ENP SLIT VALVE ACT
1 CENTURA ET1525L-7SWC-1 MONITOR
CONTROLLER
LIFT FIXTURE WAFER HANDLER
GASPANEL CAGE
MAINFRAME CONTROLLER
PYRO RADIANCE RTP
2 CENTURA 651DD2S1N2 MKS 600 SERIES PRESSURE CONTROLLER
MINI MEGAPAC
THROTTLE VALVE CONTROLLER
LAMBDA ALPHA 1000W
CHAMBER CONTROLLER RACK
CDN494 PCB
MAINFRAME INTERFACE
SWLL DRIVER
DNP-CPC1-2 PCB
LOADLOCK INTERFACE
SWLL LIFT AND CONTROLLER
AMAT FESTO PNEUMATIC VALVES
FINE WIRE THERMOCOUPLE
WELDMENTPOST HEAT W/SHUT OFF
STUD CRYO/GATE VALVE
SWLL FINS LEFT SIDE
LIQ LINE TDMAT 1/8 OD LIQ PANEL
402539-PJ MAINFRAME CABLE
GEAR, ROTATING 1.25 MODULE, 44 TEETH, 3
BANNER MINI-BEAM SENSOR
169-31W2B-X/9453 UHP VAC SWITCH
160-31W2B-X/9967 UHP VAC SWITCH
FTG TEE 1/4" TUBE
SUCTION CUP ASSY
VARIFLO VALVE
VARIFLO VALVE
AUS6R97-PJ C-SEAL ASSY 1.50 X1.50 SST 2 PORT COMPONENT
40305R01-PJ CBMAG THERM 1P DIN RAIL
GSKT VOR 1/8 NI FLAT
SEAL ASSY .860X.300 1PORT COMPONENT
763073-CEL
CABLE ASSY, SPILL SENSOR
GASLINE,BSP,GAS MODULE 300MM TXZ
BRKT,HEATER,INTERFACE,300MM TXZ
GASLINE,BSP,GAS MODULE 300MM TXZ
GASLINE,EP,GASMODULE,300MM TXZ
GASLINE,EP,HEATER,300MM TXZ
GASLINE,BSP,HEATER,300MM TXZ
GASLINE,BP,HEATER,300MM TXZ
HOSE ASSY FLEX BRAID
SAFETY SHIELD
CLAMP PLATE,HEATER INTERFACE,300MM TXZ
RETROFIT INSTRUCTIONS
HOSE CONN EL 2"CAMLOCK
HOSE CONN EL 2"CAMLOCK
CLAMP BUCKLE 1/4W 201SST
CLAMP BAND COILED 1/4W
VICOR MEGAPAC MP6-76542
407193-RV CABLE 18 AWG 100'
GASLINE,BSP,GAS MODULE 300MM TXZ
MAINFRAME CABLE
CABLE ASSY,3 ZONE HTR DRV CONTROL
HOSE ASSY FLEX BRAID
PIN 300MM ROBOT
COVER 6"VIEW PORT
SPC-953-1-G1 INTEL SHIPKIT
W EGA ROBOT PREALIGN
CABLE ASSY
SAFETY SHIELD
BRKT,HEATER,INTERFACE,300MM TXZ
GASLINE,BP,HEATER,300MM TXZ
GASLINE,BP,GAS MODULE,300MM TXZ
GASLINE,EP,HEATER,300MM TXZ
GASLINE,BSP,HEATER,300MM TXZ
CLAMP PLATE,HEATER INTERFACE,300MM TXZ
RETROFIT INSTRUCTIONS
D9FJW1010B SWAGELOK HIGH PRESSURE CHECK QTY:10
GASLINE,EP,HEATER,300MM TXZ
GASLINE,BP,GAS MODULE,300MM TXZ
GASLINE,BSP,GAS MODULE 300MM TXZ
GASLINE,EP,GASMODULE,300MM TXZ
GASLINE,BSP,HEATER,300MM TXZ
GASLINE,BP,HEATER,300MM TXZ
HOSE ASSY FLEX BRAID
CLAMP PLATE,HEATER INTERFACE,300MM TXZ
SAFETY SHIELD
BRKT,HEATER,INTERFACE,300MM TXZ
RETROFIT INSTRUCTIONS
HOSE 3/8ID PUSH LOK (50')
D9FJW1010B SWAGELOK HIGH PRESSURE CHECK (SINGLE)
CABLE POWER, T75-X1 350MM 8ft
CABLE POWER, T75-X1 350MM 9ft
GASLINE,EP,GASMODULE,300MM TXZ
HOSE ASSY FLEX BRAID
CABLE,EVC-EVC,75ft, 300MM CENTURA
HARNESS ASSY, CRYO COMPRESSOR CABLE
CABLE ASSY,75FT, W/RG
HOSE ASSY FLEX BRAID
CABLE ASSY DNET TRUNK 23METER
CABLE ASSY, 300MM ENDURA
HARNESS ASSY 300MM ENDURA
-002 LESZ 3506 CABLE
CABLE ASSY,EMO GENERATOR 1/2 INT
VALVE DOOR ATMOSPHERE SIDE
542531 SEAL DOVETAIL
FOXBORO BOARD
F05 CARRIER RESTING PLATE
FRONT SIDE KEYBOARD
V POWER SUPPLY
96V POWER SUPPLY
WINDOW,QUARTZ,LOWER
INFICON TRANSPECTOR 2 RGA W/EXT
27- CONTROLLER,REV B TYPE,MOTION
CU,LASER_ARGON - ION HEAD
APPLIED MATERIALS ANALOOG I/O PCB
-B DIGITAL I/O PCB
SVA603V-1-S SVME/AT-BCN/V
SVA004A-1-S SVME/AT-486E
STEPPER CONTROLLER
-B SMOKE/WATER LEAK DETECT PCB
162-032 MVME PCB
-21 AVIO PCB
-A INTERFACE PROCESSOR DIST. PCB
TVB0008-1 VMIF PCB
OXA 405 MAIN CONTROL MODULE PCB
LOADLOCK INTERLOCKS PCB
EC08- T.E.L PCB
PLATEN, WELDED, PRE-HEAT
R/L PNEUMATIC UNIT
ZX248 TURBO MOLECULAR PUMP CONTROLLER 305W
SWL025A-FFF ABC SWITCH
SEKIDENKO 2000
UDX5114N 5 PHASE DRIVER
986A-12BD-MDBR CDO
AET 16-4490C TURBO MOLECULAR PUMP CONTROLLER 1606W
ETC04PWM-20M TURBO MOLOECULAR PUMP CONTROLLER 600W
401010 EMI FILTER
7S0102020 GENMARK ROBOT
706027 SE04-10WA
02- RCL605 ASSY
HT94219A PCB
HT94224A BD4 PCB
BBS210-2 HITACHI PCB
HT94222A BD2 PCB
HT94217 CPU0 VER PCB
HT94218A PM1 VER
RYX-2 HITACHI PCB
BBS507-1 HITACHI PCB
BBS511-1 HITACHI PCB
PTPA-01 HITACHI PCB
BBS210-2 HITACHI PCB
SEC-4400M MASS FLOW CONTROLER
TC FC-D980C MASS FLOW CONTROLER
5 MODUCELL
D ETCH PUMP CONTROLLER
130135 PROFORT 810
LEADER/MAINFRAME ROBOT
NT340M/I TURBOTRONIK
APS-D-0298-66 PCB
SN1DYT3 PCB
BES-530-8S-PCB PCB
D RF MATCH
D RF MATCH
UBJ2MNPXX-1930 POWER CONTROL BOX
NO NUMBER CATHODE CHAMBER TURBO
REV C HDP THROTTLE VALVES
D13449 MAGNETRON HEAD
PX245-02AA BUTTERFLY VALVE UNIT
750B11TCD2GG BARATRON PRESSURE TRANSDUCER
KAV-150-P MDC SPRING LOADED VALVE
162-0040K MKS SPRING LOADED VALVE
ROBOT WAFER ARM
1075533 ROBOT
138-70-600 SPRING LOADED VAVLE
TURBOVAC400MC THROTTLE VALVE
TURBOVAC340MC THROTTLE VALVE
NT340M TURBO CH.C
CASSETTE HANDLER TOP
CASSETTE HANDLER BOTTOM
RPSC APPLICATOR
2901201 INTREACTIVE DISPLAY
FD9811001 PCB
KAV-150-P MDC SPRING LOADED VALVE
C13477 ISOLATOR, WR340,
HDP-CVD RPSC APPLICATOR
D13449 MAGNATRON HEAD
AU-PLATED 200mm LAMP MODULE
HX+300W/C NESLAB CHILLER
HEAT EXCHANGER
HEAT EXCHANGER
HEAT EXCHANGER
REV PC HEAT EXCHANGER
INR-498-001A SMC THERMO CHILLER
ITL TILT WH I/F
ITL source assy mag psu
ITL SENSOR ASSY
ITL END EFFECTOR & MAPPER
ITL LINEAR TRACK WH I/F ASSY
EDWARDS PUMP CONTROLLER
POWER DISTRIBUTION INTERFACE BOX
100 SCCM MFC
Arc PSU (Upgraded)
Beamline Vac Chassis
1SU52022 FI Comms Box
Beamline Control Chassis
HV PSU(oliok)
IHC Chassis
HIM Scan Chassis
N Port Server
MRS Controller
Active Gauge Controller
Device Net
Hivolt series 1000 Hitek power supply
CTI controller
IHC Chasise power supply (XHR7.5-80amp) filiment
PFS power supply
Eternet card
Source Suppersion supply
VAT valve (LoadLock)
Slit Valve
SOURCE BACKING VALVES
879-205-01
002-7090-08 brook robot
FFU300A01_A2200
SPP300F05_A1640
F012E03A70000
517-300-01
879-206-00
879-925-01
879-954-03
FOE03A60325
FO12C03A67500
SPPF50A60000
SERV.502.30353
2-AE-00393 PROCESS CONTROLLER
2-AE-00043 CLEAN BELLOWS DNS
2-F3-06944 UPS (NO BATTERY)
2-39-85509 MEC CVC
SMC VACUME
2AE00042 HANDLING CONTROLLER
2-AE-00042 SLIT VALVE ACTUATOR
-002 I/O EXPANSION BD
DISK DRIVE
DISK DRIVE
VMP ROBOTS
DC POWER SUPPLY
ITV CONTROLLER
ONLINE CONTROLLER UNIT
2-AE-00297 HANDLING CONTROLLER
2-AE-00042 PROCESS CONTROLLER
2-AE-00043 RF MATCH PRE CLEAN
VME POWER SUPPLY
ASSY MOTOR HTR LIFT
PVD CH INTLK
VIDEO CONTROLLER
OPTO DAUGHTER
2F306694 HEATER REFLECTOR UPPER
2F306696 HEATER REFLECTOR UPPER
2F202159 QUARTZ INNER
2F202159 DPC UV BULB MOUNT ASSY
464811 ROBOT CONTROLLER
S08R5GP DPC NOTCH ALIGNER
538882 DPC THERMOCHUCK ASSY
493101 ROBOT
KW DC PLASMA GENERATOR
IP COMPUTER
ONLINE CONTROLLER UNIT
2-AE-00081 MAIN CONTROLLER UNIT 1268 UFLA
2-AE-00096 HANDLING CONTROLLER
2-AE-00042 UPPER AND LOWER GAS DISPERSION RING
2-AX-05916 CLEAN BELLOWS DNS
PROCESS CONTROLLER
RECIRCULATION TANK
MC CIRCUIT BREAKER DRAWER
BOWEL COVER
WITH SPUTTER
MOTOR CONTROLLER
MATERIAL HANDLING DRAWER
2-F3-06944 WH ROBOT
SERVO POSITIONING CONTROLLER (NEWPORT KENSINGTON)
DFC1507 VEXTA DRIVER
W KENSINGTON ROBOT
FLYWHEEL,HOME,SENSOR
300mm XP DEGAS REFLECTOR
-003 CHAMBER TOP
PLATE TOP BLANK OFF BASE RING
CYLINDER 80SR WAFER SUPPORT 300MM
EXTENSION INTERLOCK CONNECTION
MONITOR W/STYLUS
ML4400 KEYBOARD
MONITOR W/STYLUS
DAQ MKII TYPE H
1SU52023 FICOMMS BOX.
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