等离子清洗机有白色烟雾冒出如何解决？,真空_实验百科_中国百科网
等离子清洗机有白色烟雾冒出如何解决？,真空
    
&&&&据使用者描述，一台2003年购进的扩展型等离子清洗机在清洗约20nm厚的聚合物运行40分钟后，一股白色烟气从反应舱冒出；该气体非常刺激且有毒。&&&&
&&&&&&&&首先确认白色烟气是从反应舱而非从等离子清洗机本身窜出。假如等离子清洗处于开机状态、真空泵封闭、反应舱开启、舱内无样本时，白色氧气是从等离子清洗机机箱内出来的吗？假如是的话，这说明有电子故障及可能有电子部件烧毁。假如不是，我们猜测是其它题目。
&&&&You have not specified what process gas your customer is using.&What is this and could this be contributing to the smoke issue?&Assuming the electronics are not suspect, if the plasma cleaner is run under vacuum but without the sample in the chamber, does the smoke still appear?&&It may still do so due to possible contamination buildup on the inside of the chamber and door, which may need to be removed with isopropyl alcohol or a similar cleaner.
&&&&使用者未说明处理气体是什么。该种气体可能导致白烟的产生？假如电子部件完好，假如开启清洗机及真空泵，而样本未放进舱内还有白烟出现吗？假如还冒白烟的话，可能是沉积在反应舱和舱门内壁的污物，这些污物需要用异丙醇或类似往污剂往除。
&&&&&&&Finally, if the unit is operating under vacuum in order to form plasma, with the vacuum pump in operation, any gas or contaminant in the chamber should be swept through the chamber and vacuum hose and out the pump exhaust by virtue of the pumping action and any smoke should only be seen at the pump exhaust and not around the plasma cleaner itself.&&If you do see a white colored smoke near the pump exhaust, this could possibly be oil mist from the pump and have nothing to do with the p this could be corrected with a suitable oil mist filter for the pump in question.&
&&&&&&&&假如等离子清洗机在真空状态下运转，而产生等离子，任何的气体或污物应该席卷反应舱；真空管，真空排气口处有由于抽气而产生的烟气吗？而不是等离子清洗机本身？假如看见真空泵排气口处有白色烟气，这可能是从泵里面排除的油雾，与等离子清洗机本身没任何关系；这个题目可以通过更换适当的油雾过滤器来解决。
本博客版权回&迈可诺等离子技术小组&所有，未经同意不得转载。
Copyright by ；All rights reserved.云曦?的喜欢 | LOFTER（乐乎） - 让兴趣，更有趣
LOFTER for ipad —— 让兴趣，更有趣
云曦? 的喜欢
&nbsp&nbsp被喜欢
&nbsp&nbsp被喜欢
{list posts as post}
{if post.type==1 || post.type == 5}
{if !!post.title}${post.title|escape}{/if}
{if !!post.digest}${post.digest}{/if}
{if post.type==2}
{if post.type == 3}
{if !!post.image}
{if post.type == 4}
{if !!post.image}
{if !!photo.labels && photo.labels.length>0}
{var wrapwidth = photo.ow < 500?photo.ow:500}
{list photo.labels as labs}
{var lbtxtwidth = Math.floor(wrapwidth*(labs.ort==1?labs.x:(100-labs.x))/100)-62}
{if lbtxtwidth>12}
{if !!labs.icon}
{list photos as photo}
{if photo_index==0}{break}{/if}
品牌${make||'-'}
型号${model||'-'}
焦距${focalLength||'-'}
光圈${apertureValue||'-'}
快门速度${exposureTime||'-'}
ISO${isoSpeedRatings||'-'}
曝光补偿${exposureBiasValue||'-'}
镜头${lens||'-'}
{if data.msgRank == 1}{/if}
{if data.askSetting == 1}{/if}
{if defined('posts')&&posts.length>0}
{list posts as post}
{if post_index < 3}
{if post.type == 1 || post.type == 5}
{if !!post.title}${post.title|escape}{/if}
{if !!post.digest}${post.digest}{/if}
{if post.type == 2}
{if post.type == 3}
{if post.type == 4}
{if post.type == 6}
{if drlist.length>0}
更多相似达人：
{list drlist as dr}{if drlist.length === 3 && dr_index === 0}、{/if}{if drlist.length === 3 && dr_index === 1}、{/if}{if drlist.length === 2 && dr_index === 0}、{/if}{/list}
暂无相似达人，
{if defined('posts')&&posts.length>0}
{list posts as post}
{if post.type == 2}
{if post.type == 3}
{if post.type == 4}
{if post.type == 6}
this.p={ dwrMethod:'queryLikePosts',fpost:'1dccc',userId:,blogListLength:17};}